X-ray topography of subsurface crystal layers1
نویسندگان
چکیده
New capabilities of the Berg–Barrett topographic method are demonstrated using a skew-asymmetric X-ray diffraction scheme for investigating structural changes near the surface of semiconductor materials. Specifying the X-ray extinction depth, the details of defects and strains are revealed with high resolution. Consequently, analysis of structural distortion of layers near the surface after various types of surface processing becomes more complete.
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عنوان ژورنال:
دوره 50 شماره
صفحات -
تاریخ انتشار 2017